Application of Cylindrical Distribution Functions to Anisotropic Scattering from Amorphous Films*

The cylindrical pair correlation function has been utilized as a structural tool in the study of anisotropic phase separation in magnetron sputtered amorphous FexGemo.x films. Anomalous small-angle x-ray scattering (ASAXS) measurements have been performed with the scattering vector both in and oblique to the plane of the films, to search for anisotropy. The cylindrical correlation function has been calculated from these measurements and indicates that there exist well-defined regions of electron density that are elongated (7A by 12A) in the direction of film growth. In addi ion, for a composition of x=6, these regions are well-correlated on a length scale of 27 8, for those correlation vectors oriented in the plane of the film surface, whereas the correlations are far weaker and longer in length for those vectors aligned in the direction of growth. These results are in agreement with a previous qualitative model of packed, prolate ellipsoids oriented in the direction of growth.